Small precision positioning stage for Z movement.

Precision positioning stage using flexures.

Flexible mechanism enabling controlled Z-axis movement.

Precision stage driven by piezoelectric actuators.

Piezoelectric device producing precise small movement.

Electromagnetic actuator providing precise short travel.

Actuator producing linear Z-axis displacement.

Fluid-powered actuator for Z-axis movement.

Air-powered actuator for Z-axis movement.

Device producing controlled Z-axis movement.